Invention Grant
- Patent Title: MEMS device with improved dynamic mechanical performance through damping by localized viscoelastic medium
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Application No.: US17940770Application Date: 2022-09-08
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Publication No.: US11772959B2Publication Date: 2023-10-03
- Inventor: Stefan Richter , Johannes Kindt , Veljko Milanovic
- Applicant: Mirrorcle Technologies, Inc.
- Applicant Address: US CA Richmond
- Assignee: MIRRORCLE TECHNOLOGIES, INC.
- Current Assignee: MIRRORCLE TECHNOLOGIES, INC.
- Current Assignee Address: US CA Richmond
- Agency: JDI PATENT
- Agent Joshua Isenberg; Robert Pullman
- Priority: DE 201707002.4 2017.07.21
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H02N1/00

Abstract:
MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. An actuator coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.
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