- Patent Title: Particle measuring device, calibration method, and measuring device
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Application No.: US17276847Application Date: 2019-09-30
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Publication No.: US11774340B2Publication Date: 2023-10-03
- Inventor: Haruhisa Kato , Yusuke Matsuura , Ayako Nakamura , Kaoru Kondo , Takuya Tabuchi , Hiroshi Tomita , Hidekazu Hayashi
- Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY , RION Co., Ltd. , Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY,RION Co., Ltd.,Kioxia Corporation
- Current Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY,RION Co., Ltd.,Kioxia Corporation
- Current Assignee Address: JP Tokyo; JP Tokyo; JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JP 18188919 2018.10.04
- International Application: PCT/JP2019/038490 2019.09.30
- International Announcement: WO2020/071306A 2020.04.09
- Date entered country: 2021-03-17
- Main IPC: G01N15/02
- IPC: G01N15/02 ; G06T7/80 ; G06T7/20 ; G06T7/60

Abstract:
For an easy calibration using calibration particles, provided is a measuring device to capture images of target objects. An image analyzer acquires multiple images obtained at a predetermined time interval, (a) specifies the mean-square displacement of a bright point of a calibration particle based on the displacement of the bright point of the calibration particle in the multiple images in a calibration mode, and (b) specifies the mean-square displacement of a bright point of the target particle based on the displacement of the bright point of the target particle in the multiple images in a measurement mode. A particle size analyzer (c) derives the particle size of the target particle from the mean-square displacement of the bright point of the target particle based on the mean-square displacement of the bright point of the calibration particle and the particle size of the calibration particle in an analysis mode.
Public/Granted literature
- US20210348999A1 PARTICLE MEASURING DEVICE, CALIBRATION METHOD, AND MEASURING DEVICE Public/Granted day:2021-11-11
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