Invention Grant
- Patent Title: Electromagnetic wave detector, electromagnetic wave detection apparatus, inspection apparatus, and circuit board
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Application No.: US17674103Application Date: 2022-02-17
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Publication No.: US11774606B2Publication Date: 2023-10-03
- Inventor: Takehiro Nakamura , Ryouta Saruya
- Applicant: CANON COMPONENTS, INC.
- Applicant Address: JP Saitama-ken
- Assignee: CANON COMPONENTS, INC.
- Current Assignee: CANON COMPONENTS, INC.
- Current Assignee Address: JP Saitama
- Agency: ROSSI, KIMMS & McDOWELL LLP
- Priority: JP 19158860 2019.08.30 JP 19158861 2019.08.30 JP 19158862 2019.08.30
- Main IPC: G01T1/20
- IPC: G01T1/20

Abstract:
An electromagnetic wave detector is provided. The electromagnetic wave detector comprises: a base; a sensor element arranged on a principal surface of the base and configured to convert, into an electrical signal, light emitted from a scintillator which receives an electromagnetic wave; a lens portion arranged between the scintillator and the sensor element and configured to collect the light generated by the scintillator to the sensor element; a light transmissive portion arranged between the lens portion and the sensor element and configured to transmit the light generated by the scintillator; and a shielding portion including an inner wall located on a periphery of the sensor element and configured to shield the electromagnetic wave. The inner wall is arranged between the light transmissive portion and the principal surface.
Public/Granted literature
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