• Patent Title: Method for transferring blocks from a donor substrate onto a receiver substrate by implanting ions in the donor substrate through a mask, bonding the donor substrate to the receiver substrate, and detaching the donor substrate along an embrittlement plane
  • Application No.: US17440450
    Application Date: 2020-03-25
  • Publication No.: US11776843B2
    Publication Date: 2023-10-03
  • Inventor: Didier LandruBruno Ghyselen
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR 03350 2019.03.29
  • International Application: PCT/EP2020/058427 2020.03.25
  • International Announcement: WO2020/200976A 2020.10.08
  • Date entered country: 2021-09-17
  • Main IPC: H01L21/762
  • IPC: H01L21/762 H01L21/265 H01L21/78
Method for transferring blocks from a donor substrate onto a receiver substrate by implanting ions in the donor substrate through a mask, bonding the donor substrate to the receiver substrate, and detaching the donor substrate along an embrittlement plane
Abstract:
A process for transferring blocks from a donor to a receiver substrate, comprises:



arranging a mask facing a free surface of the donor substrate, the mask having one or more openings that expose the free surface of the donor substrate, the openings distributed according to a given pattern; forming, by ion implantation through the mask, an embrittlement plane in the donor substrate vertically in line with at least one region exposed through the mask, the embrittlement plane delimiting a respective surface region; forming a block that is raised relative to the free surface of the donor substrate localized vertically in line with each respective embrittlement plane, the block comprising the respective surface region; bonding the donor substrate to the receiver substrate via each block located at the bonding interface, after removing the mask; and detaching the donor substrate along the localized embrittlement planes to transfer blocks onto the receiver substrate.
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