Invention Grant
- Patent Title: Methods for depositing gap filling fluids and related systems and devices
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Application No.: US17157467Application Date: 2021-01-25
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Publication No.: US11776846B2Publication Date: 2023-10-03
- Inventor: Timothee Blanquart
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/768 ; H01J37/32 ; C23C16/34 ; C23C16/455 ; C23C16/52
Abstract:
Methods and systems for manufacturing a structure comprising a substrate. The substrate comprises plurality of recesses and a plurality of lateral spaces. The recesses and lateral spaces are at least partially filled with a gap filling fluid.
Public/Granted literature
- US20210249303A1 METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND DEVICES Public/Granted day:2021-08-12
Information query
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