- 专利标题: Capacitor device and manufacturing method thereof
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申请号: US17219282申请日: 2021-03-31
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公开(公告)号: US11776896B2公开(公告)日: 2023-10-03
- 发明人: Jen-Yuan Chang , Chia-Ping Lai , Chien-Chang Lee
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Harrity & Harrity, LLP
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L49/02 ; H01L23/532
摘要:
Some implementations described herein provide a semiconductor structure. The semiconductor structure includes a capacitor device within a recessed portion of a substrate. The recessed portion has sidewalls and a bottom surface below a top surface of the substrate. The semiconductor structure includes a dielectric material disposed below the capacitor device and within the recessed portion. The semiconductor structure includes a first conductive structure adjacent one or more of the sidewalls of the recessed portion. The first conductive structure may include a conductive portion of the substrate or a conductive material disposed within the recessed portion. The semiconductor structure includes a second conductive structure coupled to the first conductive structure, where the second conductive structure provides an electrical connection from the first conductive structure to a voltage source or a voltage drain.
公开/授权文献
- US20220319979A1 CAPACITOR DEVICE AND MANUFACTURING METHOD THEREOF 公开/授权日:2022-10-06
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