Invention Grant
- Patent Title: Height measurement and control in confined spaces for vapor deposition system
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Application No.: US17361469Application Date: 2021-06-29
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Publication No.: US11778889B2Publication Date: 2023-10-03
- Inventor: Matthew King , Gregg Kottas , Igor Kozin , Gregory McGraw , William E. Quinn
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agency: Butzel Long
- Main IPC: H01L51/56
- IPC: H01L51/56 ; B05B12/12 ; H01L51/00 ; H10K71/00 ; H10K71/13

Abstract:
Embodiments of the disclosed subject matter provide a device having a print head that includes a micronozzle array of depositors to deposit a material on a substrate. A reflective optical device may reflect a signal output by at least one optical sensor, and to reflect the signal from a surface of the substrate to the optical sensor. A processor may determine a distance between the optical sensor and the target surface of the substrate. The device may include one or more actuators coupled to the at least one print head to move the print head relative to an internal reference frame and adjust a position of the print head to the substrate. The sensor may be fixedly coupled with a mount to the internal reference frame. The print head may be configured to move independently of the optical sensor in at least one axis of linear or rotational motion.
Public/Granted literature
- US20220020972A1 Height Measurement and Control in Confined Spaces for Vapor Deposition System Public/Granted day:2022-01-20
Information query
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