Invention Grant
- Patent Title: Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
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Application No.: US17732900Application Date: 2022-04-29
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Publication No.: US11778890B2Publication Date: 2023-10-03
- Inventor: Su-Hwan Lee , Un-Cheol Sung , Mu-Hyun Kim , Dong-Kyu Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Innovation Counsel LLP
- Priority: KR 20130056039 2013.05.16
- Main IPC: C23C14/24
- IPC: C23C14/24 ; H10K71/00 ; C23C14/04 ; C23C14/56 ; H01L21/677
Abstract:
An organic layer deposition apparatus and a method of manufacturing an organic light-emitting display device by using the apparatus. In particular, an organic layer deposition apparatus that is more easily manufactured and is suitable for use in mass production of large substrates while performing high-definition patterning thereon, as well as a method of manufacturing an organic light-emitting display device by using such an apparatus.
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