Invention Grant
- Patent Title: Capacitive pressure difference sensor with improved bonding and manufacturing method
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Application No.: US18109357Application Date: 2023-02-14
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Publication No.: US11788914B2Publication Date: 2023-10-17
- Inventor: Tiantong Xu , Haiwang Li , Zhi Tao , Xiaoda Cao , Yanxin Zhai , Chunhui Yang , Haonan Lu , Di An , Hengyi Wang , Zhiyang Wang , Kaiyun Zhu , Weidong Fang , Wenbin Wang , Kaibo Lei , Wensong Xiao , Murun Li , Xiao Zhang , Yang Feng
- Applicant: Langfang Zhichi Power Technology Ltd. , Beihang University
- Applicant Address: CN Langfang
- Assignee: LANGFANG ZHICHI POWER TECHNOLOGY LTD.,BEIHANG UNIVERSITY
- Current Assignee: LANGFANG ZHICHI POWER TECHNOLOGY LTD.,BEIHANG UNIVERSITY
- Current Assignee Address: CN Langfang; CN Beijing
- Agent Zhigang Ma
- Priority: CN 2210133527.6 2022.02.14
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L9/12

Abstract:
Provided are a pressure difference sensor, and a manufacturing method and an application thereof. A manner of bonding three layers of wafers is adopted, and the sensor includes an upper structure, an intermediate structure and a lower structure. Each of the upper structure and the intermediate structure is manufactured by a silicon-on-insulator (SOI) wafer, the lower structure is manufactured by patterned doped intrinsic silicon; and a lead pad of each of the upper electrode, and the intermediate electrode and the lower electrode is located on a corresponding one of three-stepped steps at a side of the pressure difference sensor. Annular through holes are formed around the upper electrode and the lower electrode. A constant capacitance of a capacitance signal outputted by an upper capacitor of the sensor by extending an electric field line path of the constant capacitor part.
Public/Granted literature
- US20230258521A1 CAPACITIVE PRESSURE DIFFERENCE SENSOR, AND MANUFACTURING METHOD AND APPLICATION THEREOF Public/Granted day:2023-08-17
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