Invention Grant
- Patent Title: Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope
-
Application No.: US17757343Application Date: 2021-05-08
-
Publication No.: US11789037B2Publication Date: 2023-10-17
- Inventor: Lianqing Liu , Jialin Shi , Peng Yu
- Applicant: SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Liaoning
- Assignee: SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
- Current Assignee: SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Liaoning
- Agency: NKL Law
- Agent Allen Xue
- Priority: CN 2010973514.0 2020.09.16
- International Application: PCT/CN2021/092279 2021.05.08
- International Announcement: WO2022/057277A 2022.03.24
- Date entered country: 2022-06-14
- Main IPC: G01Q60/24
- IPC: G01Q60/24 ; G01Q10/04 ; G01Q20/02 ; G01Q60/38 ; G01Q70/06

Abstract:
An atomic force microscope has dual probes composed of a hinge structure, two cantilever beams and needle tips arranged on free ends of the cantilever beams. The hinge structure is a U-shaped body having two ends respectively extended with a first cantilever beam and a second cantilever beam. The free end of the first cantilever beam and the free end of the second cantilever beam are respectively provided with a first needle tip and a second needle tip. The integrated dual probes is operated by the driving function of the probe clamp. Therefore, only a set of motion control and measurement system of the atomic force microscope is required to realize the rapid in-situ switching function of the dual probes.
Public/Granted literature
- US20230019239A1 INTEGRATED DUAL-PROBE RAPID IN-SITU SWITCHING MEASUREMENT METHOD AND DEVICE OF ATOMIC FORCE MICROSCOPE Public/Granted day:2023-01-19
Information query