Invention Grant
- Patent Title: Integrated circuit structures including backside vias
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Application No.: US17526199Application Date: 2021-11-15
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Publication No.: US11791331B2Publication Date: 2023-10-17
- Inventor: Nicholas A. Thomson , Kalyan C. Kolluru , Adam Clay Faust , Frank Patrick O'Mahony , Ayan Kar , Rui Ma
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Akona IP
- The original application number of the division: US16728111 2019.12.27
- Main IPC: H01L27/02
- IPC: H01L27/02

Abstract:
Disclosed herein are integrated circuit (IC) structures including backside vias, as well as related methods and devices. In some embodiments, an IC structure may include: a device layer, wherein the device layer includes a plurality of active devices; a first metallization layer over the device layer, wherein the first metallization layer includes a first conductive pathway in conductive contact with at least one of the active devices in the device layer; a second metallization layer under the device layer, wherein the second metallization layer includes a second conductive pathway; and a conductive via in the device layer, wherein the conductive via is in conductive contact with at least one of the active devices in the device layer and also in conductive contact with the second conductive pathway.
Public/Granted literature
- US20220077140A1 INTEGRATED CIRCUIT STRUCTURES INCLUDING BACKSIDE VIAS Public/Granted day:2022-03-10
Information query
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