Semiconductor device having a ferroelectric gate stack
Abstract:
A semiconductor device includes a SiC substrate and a plurality of transistor cells formed in the SiC substrate and electrically connected in parallel to form a transistor. Each transistor cell includes a gate structure including a gate electrode and a gate dielectric stack separating the gate electrode from the SiC substrate. The gate dielectric stack includes a ferroelectric insulator. The transistor has a specified operating temperature range, and the ferroelectric insulator is doped with a doping material such that the Curie temperature of the ferroelectric insulator is in a range above the specified operating temperature range of the transistor. A corresponding method of producing the semiconductor device is also described.
Public/Granted literature
Information query
Patent Agency Ranking
0/0