Invention Grant
- Patent Title: Nonvolatile semiconductor memory device and method for manufacturing same
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Application No.: US17576164Application Date: 2022-01-14
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Publication No.: US11792992B2Publication Date: 2023-10-17
- Inventor: Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kito , Masaru Kidoh , Hiroyasu Tanaka , Yosuke Komori , Megumi Ishiduki , Junya Matsunami , Tomoko Fujiwara , Hideaki Aochi , Ryouhei Kirisawa , Yoshimasa Mikajiri , Shigeto Oota
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 09072950 2009.03.24
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H10B43/27 ; H01L29/66 ; H01L29/792 ; H10B43/20 ; H01L21/223 ; H01L21/265 ; H01L29/78 ; H01L29/04 ; H01L29/16 ; H01L29/423 ; H01L29/49 ; H01L29/10

Abstract:
A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of insulating films alternately stacked with a plurality of electrode films in a first direction; a selection gate electrode stacked on the stacked structural unit in the first direction; an insulating layer stacked on the selection gate electrode in the first direction; a first semiconductor pillar piercing the stacked structural unit, the selection gate electrode, and the insulating layer in the first direction, a first cross section of the first semiconductor pillar having an annular configuration, the first cross section being cut in a plane orthogonal to the first direction; a first core unit buried in an inner side of the first semiconductor pillar, the first core unit being recessed from an upper face of the insulating layer; and a first conducting layer of the first semiconductor pillar provided on the first core unit to contact the first core unit.
Public/Granted literature
- US20220139955A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2022-05-05
Information query
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