发明授权
- 专利标题: Acoustic intensity sensor using a MEMS triaxial accelerometer and MEMS microphones
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申请号: US17332390申请日: 2021-05-27
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公开(公告)号: US11796562B2公开(公告)日: 2023-10-24
- 发明人: James W. Waite , David Raymond Dall'Osto , Peter Hans Dahl
- 申请人: Nanotok LLC , University of Washington
- 申请人地址: US WA Eastsound
- 专利权人: AIVS Inc.
- 当前专利权人: AIVS Inc.
- 当前专利权人地址: US WA Seattle
- 代理商 Michael Dryja
- 主分类号: G01P15/18
- IPC分类号: G01P15/18 ; G01H3/10 ; G01S3/803 ; G01S5/18 ; H04R29/00 ; G10K11/00 ; G01H3/12 ; G01S5/08 ; G03H3/00
摘要:
An airborne acoustic vector sensor for simultaneously measuring triaxial particle acceleration in three dimensions and pressure includes a triaxial MEMS accelerometer sensitive to an Earth gravitational field. The airborne acoustic vector sensor includes one or multiple MEMS microphones sensitive to sound pressure and overlapping the accelerometer in frequency. The airborne acoustic vector sensor includes a solid body having a density approximating a density of air. The accelerometer is mounted in or upon the solid body. The airborne acoustic vector sensor includes a suspension system supporting the accelerometer and solid body within a framework.
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