Invention Grant
- Patent Title: Magnetic sensor device
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Application No.: US17506098Application Date: 2021-10-20
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Publication No.: US11796609B2Publication Date: 2023-10-24
- Inventor: Yves Bidaux , Lionel Tombez
- Applicant: Melexis Technologies SA
- Applicant Address: CH Bevaix
- Assignee: MELEXIS TECHNOLOGIES SA
- Current Assignee: MELEXIS TECHNOLOGIES SA
- Current Assignee Address: CH Bevaix
- Agency: WORKMAN NYDEGGER
- Priority: EP 205330 2020.11.03
- Main IPC: G01R33/07
- IPC: G01R33/07 ; H10N52/01 ; H10N52/80 ; H10N52/00

Abstract:
An integrated sensor device includes: a semiconductor substrate comprising a horizontal Hall element, and an integrated magnetic flux concentrator located substantially above said horizontal Hall element, wherein the first magnetic flux concentrator has a shape with a geometric center which is aligned with a geometric centre of the horizontal Hall element; and wherein the shape has a height H and a transversal dimension D, wherein H≥30 μm and/or wherein (H/D)≥25%. The integrated magnetic flux concentrator may be partially incorporated in the “interconnection stack”. A method is provided for producing such an integrated sensor device.
Public/Granted literature
- US20220137161A1 MAGNETIC SENSOR DEVICE Public/Granted day:2022-05-05
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