Invention Grant
- Patent Title: Methods of use of a servo control system
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Application No.: US16801622Application Date: 2020-02-26
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Publication No.: US11798833B2Publication Date: 2023-10-24
- Inventor: Paul Wirth , Behzad Taheri
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/687
- IPC: H01L21/687 ; F15B9/03 ; F15B11/076 ; F15B9/14
Abstract:
Disclosed herein are embodiments of a lift apparatus and systems containing a support and at least one lift apparatus for moving a substrate between the support and a transfer plane, using a servo-control system. Further disclosed herein are methods for servo control of a lift apparatus and lifting a substrate off of a support or lowering the substrate onto the support.
Public/Granted literature
- US20210265194A1 SERVO CONTROL OF A LIFT APPARATUS AND METHODS OF USE THEREOF Public/Granted day:2021-08-26
Information query
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