- 专利标题: MEMS transducer with improved performance
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申请号: US17758923申请日: 2021-01-15
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公开(公告)号: US11800294B2公开(公告)日: 2023-10-24
- 发明人: Alfons Dehé , Achim Bittner , Lenny Castellanos
- 申请人: Hahn-Schickard-Gesellschaft für Angewandte Forschung e. V.
- 申请人地址: DE Villingen-Schwenningen
- 专利权人: Hahn-Schickard-Gesellschaft für Angewandte Forschung e. V.
- 当前专利权人: Hahn-Schickard-Gesellschaft für Angewandte Forschung e. V.
- 当前专利权人地址: DE Villingen-Schwenningen
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: EP 152560 2020.01.17 EP 168836 2020.04.08
- 国际申请: PCT/EP2021/050766 2021.01.15
- 国际公布: WO2021/144400A 2021.07.22
- 进入国家日期: 2022-07-15
- 主分类号: H04R17/00
- IPC分类号: H04R17/00 ; H04R7/12 ; H04R31/00 ; H04R17/10
摘要:
The invention relates to a MEMS transducer comprising a vibratable membrane for generating or receiving pressure waves in a fluid in a vertical direction, wherein the vibratable membrane is supported by a carrier and the vibratable membrane exhibits two or more vertical sections which are formed parallel to the vertical direction and comprise at least one layer of actuator material. The end of the vibratable membrane is preferably connected to an electrode, such that the two or more vertical sections can be induced to vibrate horizontally by driving the at least one electrode, or such that an electrical signal can be generated at the at least one electrode when the two or more vertical sections are induced to vibrate horizontally.
公开/授权文献
- US20230047856A1 MEMS TRANSDUCER WITH INCREASED PERFORMANCE 公开/授权日:2023-02-16
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