Invention Grant
- Patent Title: Microelectromechanical membrane transducer with active damper
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Application No.: US17337296Application Date: 2021-06-02
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Publication No.: US11807519B2Publication Date: 2023-11-07
- Inventor: Domenico Giusti , Fabio Quaglia
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: SEED IP LAW GROUP LLP
- Priority: IT 2020000015073 2020.06.23
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00 ; F16F15/00

Abstract:
A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.
Public/Granted literature
- US20210395075A1 MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER Public/Granted day:2021-12-23
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