Invention Grant
- Patent Title: Gas sensor, sensor array module and mobile device including the same
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Application No.: US17141456Application Date: 2021-01-05
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Publication No.: US11821871B2Publication Date: 2023-11-21
- Inventor: Kwangmin Park , Sihoon Lee , Jaeheung Lim , Jeongho Park
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR 20200070582 2020.06.10
- Main IPC: G01N29/02
- IPC: G01N29/02 ; G01N29/24

Abstract:
A gas sensor includes a piezoelectric substrate; a resonator in an electrode region on an upper surface of the piezoelectric substrate, the resonator including interdigital transducer (IDT) electrodes and IDT pads connected to the IDT electrodes, the IDT electrodes configured to generate a surface acoustic wave in a center region of the electrode region, the surface acoustic wave propagating in a first horizontal direction; a sensing film in the center region of the electrode region on the upper surface of the piezoelectric substrate, the sensing film including a sensing material that interacts with a target gas; and a heater in an edge region surrounding the electrode region on the upper surface of the piezoelectric substrate, the heater including heater electrodes configured to heat the sensing film and heater pads connected to the heater electrodes, the heater electrodes and the heater pads forming a closed conduction loop.
Public/Granted literature
- US20210389277A1 GAS SENSOR, SENSOR ARRAY MODULE AND MOBILE DEVICE INCLUDING THE SAME Public/Granted day:2021-12-16
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