Invention Grant
- Patent Title: Gas sensor device for detecting gases with large molecules
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Application No.: US17166580Application Date: 2021-02-03
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Publication No.: US11821884B2Publication Date: 2023-11-21
- Inventor: Malek Brahem , Hatem Majeri , Olivier Le Neel , Ravi Shankar , Enrico Rosario Alessi , Pasquale Biancolillo
- Applicant: STMICROELECTRONICS S.r.l. , STMICROELECTRONICS PTE LTD
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.,STMICROELECTRONICS PTE LTD
- Current Assignee: STMICROELECTRONICS S.r.l.,STMICROELECTRONICS PTE LTD
- Current Assignee Address: IT Agrate Brianza; SG Singapore
- Agency: SEED IP LAW GROUP LLP
- The original application number of the division: US15901721 2018.02.21
- Main IPC: G01N33/00
- IPC: G01N33/00 ; G01N27/12 ; G01N27/02

Abstract:
The present disclosure is directed to a gas sensor device that detects gases with large molecules (e.g., a gas with a molecular weight between 150 g/mol and 450 g/mol), such as siloxanes. The gas sensor device includes a thin film gas sensor and a bulk film gas sensor. The thin film gas sensor and the bulk film gas sensor each include a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. The SMO film of the thin film gas sensor is an thin film (e.g., between 90 nanometers and 110 nanometers thick), and the SMO film of the bulk film gas sensor is an thick film (e.g., between 5 micrometers and 20 micrometers thick). The gas sensor device detects gases with large molecules based on a variation between resistances of the SMO thin film and the SMO thick film.
Public/Granted literature
- US20210156836A1 GAS SENSOR DEVICE FOR DETECTING GASES WITH LARGE MOLECULES Public/Granted day:2021-05-27
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