Invention Grant
- Patent Title: System and method for detecting the concentration of metal particles
-
Application No.: US16685618Application Date: 2019-11-15
-
Publication No.: US11821886B2Publication Date: 2023-11-21
- Inventor: Massimo Cataldo Mazzillo , Antonella Sciuto
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: SEED IP LAW GROUP LLP
- Priority: IT 2018000010396 2018.11.16
- Main IPC: H01L29/872
- IPC: H01L29/872 ; G01N33/20 ; G01N27/414

Abstract:
A system for detecting the concentration of metal particles of at least one first material, which includes a detector with: a semiconductor body including a cathode region, delimited by a front surface; and an anode structure made of metal material, which extends over a part of the cathode region, leaving part of the front surface exposed. The anode structure and the part of the cathode region form a first contact of a Schottky type. The exposed part of the front surface can access the metal particles.
Public/Granted literature
- US20200158710A1 SYSTEM AND METHOD FOR DETECTING THE CONCENTRATION OF METAL PARTICLES Public/Granted day:2020-05-21
Information query
IPC分类: