- 专利标题: Chip with bifunctional routing and associated method of manufacturing
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申请号: US17479472申请日: 2021-09-20
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公开(公告)号: US11823997B2公开(公告)日: 2023-11-21
- 发明人: Candice Thomas , Jean Charbonnier , Perceval Coudrain , Maud Vinet
- 申请人: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Paris
- 代理机构: Pillsbury Winthrop Shaw Pittman LLP
- 优先权: FR 09541 2020.09.21
- 主分类号: H01L23/498
- IPC分类号: H01L23/498 ; H01L21/768 ; H01L23/00 ; G06N10/00 ; H10N60/81
摘要:
A functional chip includes a substrate including a first face and a second face, the second face of the substrate forming the front face of the functional chip; a first oxide layer on the first face of the substrate; a second oxide layer on the first oxide layer; a first routing level formed on the surface of the second oxide layer in contact with the first oxide layer; a third oxide layer on the second oxide layer wherein a semiconductor component is inserted; a rear face formed by the surface of the third oxide layer opposite the second oxide layer, the rear face including superconductor routing tracks surrounded at least partially by one or more conductor routing tracks, the semiconductor component being connected to the superconductor routing tracks via superconductor vias and the conductor routing tracks of the rear face being connected to the routing level via conductor vias.
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