Invention Grant
- Patent Title: Semiconductor memory device with buried contacts and a fence
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Application No.: US17493671Application Date: 2021-10-04
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Publication No.: US11832442B2Publication Date: 2023-11-28
- Inventor: Hyeon Woo Jang , Soo Ho Shin , Dong Sik Park , Jong Min Lee , Ji Hoon Chang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR 20210019713 2021.02.15
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
The present disclosure provides a semiconductor memory device with improved element performance and reliability. The semiconductor memory device comprises a substrate, a gate electrode extending in a first direction in the substrate, a plurality of buried contacts on the substrate, and a fence in a trench between adjacent ones of the buried contacts. The fence is on the gate electrode. The fence includes a spacer film on side walls of the trench and extending in a second direction intersecting the first direction, and a filling film in the trench and on the spacer film. An upper surface of the spacer film is lower than an upper surface of the filling film with respect to the substrate.
Public/Granted literature
- US20220262803A1 SEMICONDUCTOR MEMORY DEVICE WITH BURIED CONTACTS AND A FENCE Public/Granted day:2022-08-18
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