Invention Grant
- Patent Title: Hollow-core photonic crystal fiber based broadband radiation generator
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Application No.: US17539347Application Date: 2021-12-01
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Publication No.: US11846867B2Publication Date: 2023-12-19
- Inventor: Janneke Ravensbergen , Patrick Sebastian Uebel , Willem Richard Pongers
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 213013 2020.12.10 EP 178292 2021.06.08
- Main IPC: G02F1/35
- IPC: G02F1/35 ; G02B6/02 ; G02F1/365 ; H01S3/067 ; G06F30/392 ; G06F30/398 ; G03F9/00 ; G06F119/18

Abstract:
A broadband radiation source device configured for generating a broadband output radiation upon receiving pump radiation, the device including: a hollow-core photonic crystal fiber (HC-PCF) including at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion includes at least a structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein the at least one structurally varied portion is configured and located such that the broadband output radiation includes wavelengths in the ultraviolet region.
Public/Granted literature
- US20220187680A1 HOLLOW-CORE PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION GENERATOR Public/Granted day:2022-06-16
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