发明授权
- 专利标题: Inspecting device
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申请号: US17120253申请日: 2020-12-13
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公开(公告)号: US11852470B2公开(公告)日: 2023-12-26
- 发明人: Chih-Chieh Liao , Yu-Min Sun , Chih-Feng Cheng
- 申请人: Global Unichip Corporation , Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Global Unichip Corporation,Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Global Unichip Corporation,Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu; TW Hsinchu
- 代理机构: JCIPRNET
- 优先权: TW 9137550 2020.10.29
- 主分类号: G01B5/20
- IPC分类号: G01B5/20 ; G01N21/88 ; G01R31/00
摘要:
An inspecting device including a carrier, multiple telescopic probes, a locking component and a conductive structure is provided. The carrier has a through hole and a ground pad corresponding to the through hole. The through hole penetrates from the first surface to the second surface of the carrier, and the ground pad is disposed on the second surface. The telescopic probes are disposed in parallel on the first surface of the carrier. The locking component passes through the through hole and is disposed between two adjacent telescopic probes of the multiple telescopic probes. The locking component includes a screw. A head of the screw has a first pitch and a second pitch, and a density of the first pitch is different from a density of the second pitch. The conductive structure is partially embedded in the locking component, and the conductive structure, the locking component and the ground pad are electrically connected.
公开/授权文献
- US20220136816A1 INSPECTING DEVICE 公开/授权日:2022-05-05
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