Invention Grant
- Patent Title: Electroplating apparatus and electroplating method
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Application No.: US17705405Application Date: 2022-03-28
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Publication No.: US11859302B2Publication Date: 2024-01-02
- Inventor: Heng-Ming Nien , Chih-Chiang Lu , Chih-Kai Chan , Shih-Lian Cheng
- Applicant: Unimicron Technology Corp.
- Applicant Address: TW Taoyuan
- Assignee: Unimicron Technology Corp.
- Current Assignee: Unimicron Technology Corp.
- Current Assignee Address: TW Taoyuan
- Agency: JCIPRNET
- Priority: TW 1109527 2022.03.16
- Main IPC: C25D5/00
- IPC: C25D5/00 ; C25D21/12 ; H05K3/18

Abstract:
An electroplating apparatus includes an anode and a cathode, a power supply, a regulating plate, and a controller. The power supply is electrically connected to the anode and the cathode. The regulating plate is disposed between the anode and the cathode. The regulating plate includes an insulation grid plate and a plurality of wires. The controller is electrically connected to the plurality of wires to control a state of an electromagnetic field around the plurality of wires. An electroplating method is also provided.
Public/Granted literature
- US20230124913A1 ELECTROPLATING APPARATUS AND ELECTROPLATING METHOD Public/Granted day:2023-04-20
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