Invention Grant
- Patent Title: Cascade defect inspection
-
Application No.: US17723322Application Date: 2022-04-18
-
Publication No.: US11861818B2Publication Date: 2024-01-02
- Inventor: Zhichao Chen , Wei Fang
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01N21/95

Abstract:
A defect inspection system is disclosed. According to certain embodiments, the system includes a memory storing instructions implemented as a plurality of modules. Each of the plurality of modules is configured to detect defects having a different property. The system also includes a controller configured to cause the computer system to: receive inspection data representing an image of a wafer; input the inspection data to a first module of the plurality of modules, the first module outputs a first set of points of interests (POIs) having a first property; input the first set of POIs to a second module of the plurality of modules, the second module output a second set of POIs having the second property; and report that the second set of POIs as defects having both the first property and the second property.
Public/Granted literature
- US20220245787A1 CASCADE DEFECT INSPECTION Public/Granted day:2022-08-04
Information query