Invention Grant
- Patent Title: Field-effect transistors with a crystalline body embedded in a trench isolation region
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Application No.: US17527716Application Date: 2021-11-16
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Publication No.: US11862511B2Publication Date: 2024-01-02
- Inventor: Steven M. Shank , Siva P. Adusumilli , Alvin Joseph
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/02

Abstract:
Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. The structure includes a semiconductor substrate having a first trench, and a trench isolation region positioned in the first trench. The trench isolation region contains a dielectric material, the trench isolation region includes a second trench surrounded by the dielectric material, and the trench isolation region includes openings that penetrate through the dielectric material. A semiconductor layer is positioned in the second trench of the trench isolation region. The semiconductor layer contains a single-crystal semiconductor material.
Public/Granted literature
- US20230154786A1 FIELD-EFFECT TRANSISTORS WITH A CRYSTALLINE BODY EMBEDDED IN A TRENCH ISOLATION REGION Public/Granted day:2023-05-18
Information query
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