- 专利标题: Semiconductor storage device
-
申请号: US17120951申请日: 2020-12-14
-
公开(公告)号: US11862696B2公开(公告)日: 2024-01-02
- 发明人: Shunsuke Okada , Tomonori Aoyama , Tatsunori Isogai , Masaki Noguchi
- 申请人: Kioxia Corporation
- 申请人地址: JP Tokyo
- 专利权人: Kioxia Corporation
- 当前专利权人: Kioxia Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP 20047862 2020.03.18
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L21/28 ; H01L29/51 ; H10B43/27
摘要:
A semiconductor storage device relating to one embodiment includes: a stacked body in which electrode films and insulating films are alternately stacked in a first direction; a first and a second charge storage films that are arranged away from each other in the first direction inside the stacked body and each face one of the electrode films; and a tunnel insulating film that extends in the first direction inside the stacked body and is in contact with the first and the second charge storage films. The first and the second charge storage films each include a first film that is in contact with the electrode film and contains a High-k material, and a second film that is provided between the first film and the tunnel insulating film and contains silicon nitride.
公开/授权文献
- US20210296458A1 SEMICONDUCTOR STORAGE DEVICE 公开/授权日:2021-09-23
信息查询
IPC分类: