Invention Grant
- Patent Title: Integration of semiconductor membranes with piezoelectric substrates
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Application No.: US16881305Application Date: 2020-05-22
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Publication No.: US11864465B2Publication Date: 2024-01-02
- Inventor: Max G. Lagally , Abhishek Bhat , Frank Steele Flack , Shelley Ann Scott , Robert H. Blick
- Applicant: Wisconsin Alumni Research Foundation , University of Hamburg
- Applicant Address: US WI Madison
- Assignee: Wisconsin Alumni Research Foundation
- Current Assignee: Wisconsin Alumni Research Foundation
- Current Assignee Address: US WI Madison
- Agency: Bell & Manning, LLC
- Main IPC: H01L41/312
- IPC: H01L41/312 ; H10N30/072 ; H10N30/20 ; H10N30/80 ; H10N30/87 ; H10N30/853
Abstract:
Piezoelectrically actuated devices constructed from thin semiconductor membranes bonded directly to piezoelectric substrates are provided. Methods for fabricating these devices are also provided. The bonding of the semiconductor to the piezoelectric material does not require the use of any intermediate layers, such as bonding agents.
Public/Granted literature
- US20210367138A1 INTEGRATION OF SEMICONDUCTOR MEMBRANES WITH PIEZOELECTRIC SUBSTRATES Public/Granted day:2021-11-25
Information query
IPC分类:
