Invention Grant
- Patent Title: Nanoplasmonic instrumentation, materials, methods and system integration
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Application No.: US17677298Application Date: 2022-02-22
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Publication No.: US11867597B2Publication Date: 2024-01-09
- Inventor: Nikhil Bhalla , Amy Shen Fried , Kang-Yu Chu
- Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Applicant Address: JP Okinawa
- Assignee: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Current Assignee: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Current Assignee Address: JP Okinawa
- Agency: WHDA, LLP
- Main IPC: G01N21/75
- IPC: G01N21/75 ; G01N33/543 ; C03C17/09 ; G01N21/552 ; G01N21/41

Abstract:
A method for making a plasmonic mushroom array includes: forming a plurality of metal nano-islands each having nanometer-range dimensions on a surface of a glass substrate; and subjecting to the glass substrate having the plurality of metal nano-islands formed thereon to reactive ion etching such that the plurality of metal nano-islands are converted to a plurality of mushroom-shaped structures each having a metal cap supported by a pillar made of a material of the glass substrate and each having dimensions smaller than the dimensions of the nano-islands, the plurality of mushroom-shaped structures being arranged in a substantially regular pattern with intervals smaller than average intervals between the nano-islands, thereby forming the plurality of nano-scale mushroom-shaped structures on the glass substrate that can exhibit localized surface plasmon resonance.
Public/Granted literature
- US20220170926A1 NANOPLASMONIC INSTRUMENTATION, MATERIALS, METHODS AND SYSTEM INTEGRATION Public/Granted day:2022-06-02
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