Invention Grant
- Patent Title: Probe systems including imaging devices with objective lens isolators, and related methods
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Application No.: US17078778Application Date: 2020-10-23
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Publication No.: US11874301B2Publication Date: 2024-01-16
- Inventor: Kazuki Negishi , Yu-Wen Huang , Gerald Lee Gisler , Eric Robert Christenson , Michael E. Simmons
- Applicant: FormFactor, Inc.
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: KOLITCH ROMANO DASCENZO GATES LLC
- Main IPC: G01R1/07
- IPC: G01R1/07 ; G01R31/308 ; G01R31/319

Abstract:
Probe systems including imaging devices with objective lens isolators and related methods are disclosed herein. A probe system includes an enclosure with an enclosure volume for enclosing a substrate that includes one or more devices under test (DUTs), a testing assembly, and an imaging device. The imaging device includes an imaging device objective lens, an imaging device body, and an objective lens isolator. In examples, the probe system includes an electrical grounding assembly configured to restrict electromagnetic noise from entering the enclosure volume. In examples, methods of preparing the imaging device include assembling the imaging device such that the imaging device objective lens is at least partially electrically isolated from the imaging device body. In some examples, utilizing the probe system includes testing the one or more DUTs while restricting electrical noise from propagating from the imaging device to the substrate.
Public/Granted literature
- US20210132115A1 PROBE SYSTEMS INCLUDING IMAGING DEVICES WITH OBJECTIVE LENS ISOLATORS, AND RELATED METHODS Public/Granted day:2021-05-06
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