- 专利标题: Multi-channel plasma reaction cell
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申请号: US17335575申请日: 2021-06-01
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公开(公告)号: US11875974B2公开(公告)日: 2024-01-16
- 发明人: Phillip Gerard Langhorst
- 申请人: Preservation Tech LLC
- 申请人地址: US IA Hull
- 专利权人: Preservation Tech, LLC
- 当前专利权人: Preservation Tech, LLC
- 当前专利权人地址: US IA Hull
- 代理机构: Dentons Davis Brown
- 代理商 Matthew Coryell
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A plasma reaction cell includes a discharge chamber with a base plate, a side wall, and a cooling plate. A discharge stack mounted within the discharge chamber includes a first insulation plate, a first conductive spacer, a second insulation plate, and a second conductive spacer. An electrode electrically coupled to the first conductive spacer extends through the side wall of the discharge chamber. A first gas channel formed between the first conductive spacer and the first insulation plate has a first end in fluid communication with a first gas port and a second end in fluid communication with a second gas port. A second gas channel formed between the first conductive spacer and the second insulation plate has a first end in fluid communication with the first gas port and a second end in fluid communication with the second gas port.
公开/授权文献
- US20210375593A1 MULTI-CHANNEL PLASMA REACTION CELL 公开/授权日:2021-12-02
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