- 专利标题： Test circuit and test method
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申请号： US16818264申请日： 2020-03-13
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公开(公告)号： US11876021B2公开(公告)日： 2024-01-16
- 发明人: Daiki Kiribuchi , Takeichiro Nishikawa , Hidetaka Eguchi
- 申请人： KABUSHIKI KAISHA TOSHIBA , Kioxia Corporation
- 申请人地址： JP Minato-ku
- 专利权人： KABUSHIKI KAISHA TOSHIBA,Kioxia Corporation
- 当前专利权人： KABUSHIKI KAISHA TOSHIBA,Kioxia Corporation
- 当前专利权人地址： JP Minato-ku; JP Minato-ku
- 代理机构： Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JP 19097006 2019.05.23
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G05B19/418
摘要：
A manufacturing control apparatus has an acquiring part that acquires past manufacturing data in which a target value of an output value of the intermediate product, the output value of the intermediate product, and quality of a final product produced from the manufacturing apparatus are associated with one another, an output predicting part that predicts, based on the target value of the intermediate product and the output value of the intermediate product in the past manufacturing data, the output value of the intermediate product for each of possible target values of the intermediate product, and a quality predicting part that predicts, based on the output value of the intermediate product and the quality of the final product in the past manufacturing data, the quality of the final product from a predicted value of the output value of the intermediate product for each of the predicted possible target values.
公开/授权文献
- US20200373207A1 TEST CIRCUIT AND TEST METHOD 公开/授权日：2020-11-26
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