Invention Grant
- Patent Title: Measurement method, measurement device, measurement system, and measurement program
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Application No.: US17204091Application Date: 2021-03-17
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Publication No.: US11881102B2Publication Date: 2024-01-23
- Inventor: Yoshihiro Kobayashi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Toyko
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Toyko
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP 20047141 2020.03.18
- Main IPC: G08G1/02
- IPC: G08G1/02 ; G01G19/03

Abstract:
A measurement method includes: a step of acquiring first observation point information; a step of acquiring second observation point information; a step of calculating a path deflection waveform at a third observation point; a step of calculating a path deflection waveform at a central position between the first observation point and the second observation point; a step of calculating a measurement waveform as a physical quantity at the third observation point; a step of calculating an amplitude coefficient at which a difference is minimized between the measurement waveform and a waveform obtained by multiplying the path deflection waveform at the third observation point by the amplitude coefficient; and a step of calculating, based on the path deflection waveform at the central position and the amplitude coefficient, an estimation waveform as a physical quantity at the central position.
Public/Granted literature
- US20210304597A1 Measurement Method, Measurement Device, Measurement System, And Measurement Program Public/Granted day:2021-09-30
Information query
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