- 专利标题: Method for manufacturing glass device, and glass device
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申请号: US17113929申请日: 2020-12-07
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公开(公告)号: US11881414B2公开(公告)日: 2024-01-23
- 发明人: Masashi Sawadaishi
- 申请人: TOPPAN PRINTING CO.,LTD.
- 申请人地址: JP Tokyo
- 专利权人: TOPPAN PRINTING CO., LTD.
- 当前专利权人: TOPPAN PRINTING CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Foley & Lardner LLP
- 优先权: JP 18110668 2018.06.08
- 主分类号: H01L21/48
- IPC分类号: H01L21/48 ; H01L23/15 ; H01L23/498 ; C03C23/00 ; C03C15/00 ; H01L21/683
摘要:
A glass device including a thin glass substrate which has a glass thickness of 300 μm or less is enabled to be provided more easily. In a method for manufacturing the glass device, one or more through holes are formed in a glass substrate, and a first wiring on a first surface side of the glass substrate and a second wiring on a second surface side of the glass substrate are electrically connected to each other via the through holes. After the first wiring is provided, the through holes are formed while the glass substrate is being thinned by etching. Then, wirings in the through holes and the second wiring are formed. The thinned glass substrate has a thickness of 50 μm or more and 300 μm or less. The through holes have the shape of a truncated cone.
公开/授权文献
- US20210118698A1 METHOD FOR MANUFACTURING GLASS DEVICE, AND GLASS DEVICE 公开/授权日:2021-04-22
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