- 专利标题: Metal gate structure and method of fabricating the same
-
申请号: US17523946申请日: 2021-11-11
-
公开(公告)号: US11881518B2公开(公告)日: 2024-01-23
- 发明人: Jie-Ning Yang , Wen-Tsung Chang , Po-Wen Su , Kuan-Ying Lai , Bo-Yu Su , Chun-Mao Chiou , Yao-Jhan Wang
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Hsin-Chu
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu
- 优先权: TW 7139307 2018.11.06
- 分案原申请号: US16205174 2018.11.29
- 主分类号: H01L29/49
- IPC分类号: H01L29/49 ; H01L29/423 ; H01L29/66 ; H01L21/8234 ; H01L21/768 ; H01L29/417
摘要:
A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
公开/授权文献
- US20220069102A1 METAL GATE STRUCTURE AND METHOD OF FABRICATING THE SAME 公开/授权日:2022-03-03
信息查询
IPC分类: