Invention Grant
- Patent Title: Cleaning solution detection device
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Application No.: US17505185Application Date: 2021-10-19
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Publication No.: US11883857B2Publication Date: 2024-01-30
- Inventor: Hyung Chul Kim , You Sun Jung
- Applicant: KCTECH CO., LTD.
- Applicant Address: KR Gyeonggi-do
- Assignee: KCTECH CO., LTD.
- Current Assignee: KCTECH CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: KDW Firm PLLC
- Priority: KR 20200139576 2020.10.26
- Main IPC: B08B3/02
- IPC: B08B3/02 ; B08B5/04

Abstract:
A cleaning solution detection device includes a transfer part configured to unload and transfer a substrate having a surface to which a cleaning solution is applied when a cleaning process is completed, a detector configured to detect the cleaning solution that falls from the surface of the substrate in a process in which the substrate is unloaded and transferred by the transfer part, and a controller configured to determine whether a dangerous situation occurs due to a fall of the cleaning solution based on information detected by the detector.
Public/Granted literature
- US20220126328A1 CLEANING SOLUTION DETECTION DEVICE Public/Granted day:2022-04-28
Information query
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