Invention Grant
- Patent Title: Robot apparatus including dual end effectors with variable pitch and methods
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Application No.: US16434886Application Date: 2019-06-07
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Publication No.: US11883958B2Publication Date: 2024-01-30
- Inventor: Karuppasamy Muthukamatchy , Rajkumar Thanu , Eran Weiss , Jeffrey C. Hudgens , Chandrakant M. Sapkale
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J9/00 ; B25J9/10 ; B25J9/16 ; H01L21/02

Abstract:
A robot apparatus may include an upper arm adapted to rotate about a first rotational axis and a forearm rotatably coupled to the upper arm at a second rotational axis. A first wrist member may be rotatably coupled to the forearm at a third rotation axis. A second wrist member may be rotatably coupled to the forearm at the third rotation axis. A first end effector may be coupled to the first wrist member and a second end effector may be coupled to the second wrist member. The first wrist member and the second wrist member may be configured to rotate about the third rotational axis between a first pitch and a second pitch as a function of extension of the robot apparatus. Other apparatus and methods are disclosed.
Information query
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