- 专利标题: Optical measurement system, optical measurement method, and non-transitory storage medium having measurement program stored thereon
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申请号: US17655899申请日: 2022-03-22
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公开(公告)号: US11892281B2公开(公告)日: 2024-02-06
- 发明人: Shiro Kawaguchi , Kazuya Nakajima , Hayato Takizawa , Goro Maeda
- 申请人: Otsuka Electronics Co., Ltd.
- 申请人地址: JP Osaka
- 专利权人: Otsuka Electronics Co., Ltd.
- 当前专利权人: Otsuka Electronics Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Studebaker & Brackett PC
- 优先权: JP 21048379 2021.03.23
- 主分类号: G01B11/06
- IPC分类号: G01B11/06 ; G01J3/02 ; G01J3/10 ; G01B5/00 ; G01N21/27 ; G01B9/02055 ; G01J3/28 ; G01N21/25 ; G01B21/04
摘要:
An optical measurement system includes a light source, a spectroscopic detector, a reference sample, a switching mechanism that switches between a first optical path through which a sample to be measured is irradiated with light from the light source and light produced at the sample is guided to the spectroscopic detector and a second optical path through which the reference sample is irradiated with light from the light source and light produced at the reference sample is guided to the spectroscopic detector, and a processing unit that calculates, by performing correction processing based on change between a first detection result at first time and a second detection result at second time, a measurement value of the sample from a third detection result provided from the spectroscopic detector as a result of irradiation of the sample with light from the light source at third time temporally proximate to the second time.
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