Invention Grant
- Patent Title: Method to measure light loss of optical films and optical substrates
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Application No.: US17692573Application Date: 2022-03-11
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Publication No.: US11892367B2Publication Date: 2024-02-06
- Inventor: Jinxin Fu , Kang Luo , Fariah Hayee , Ludovic Godet
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01M11/02
- IPC: G01M11/02

Abstract:
A method of optical device metrology is provided. The method includes introducing a first type of light into a first optical device during a first time period, the first optical device including an optical substrate and an optical film disposed on the optical substrate, the first optical device further including a first surface, a second surface, and one or more sides connecting the first surface with the second surface; and measuring, during the first time period, a quantity of the first type of light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector coupled to one or more fiber heads positioned to collect the light transmitted from the plurality of locations.
Public/Granted literature
- US20220291083A1 METHOD TO MEASURE LIGHT LOSS OF OPTICAL FILMS AND OPTICAL SUBSTRATES Public/Granted day:2022-09-15
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