Invention Grant
- Patent Title: Method of fabricating a perovskite-material based trench capacitor using rapid thermal annealing (RTA) methodologies
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Application No.: US17649899Application Date: 2022-02-03
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Publication No.: US11894417B2Publication Date: 2024-02-06
- Inventor: Niloy Mukherjee , Somilkumar J. Rathi , Jason Y. Wu , Pratyush Pandey , Zeying Ren , FNU Atiquzzaman , Gabriel Antonio Paulius Velarde , Noriyuki Sato , Mauricio Manfrini , Tanay Gosavi , Rajeev Kumar Dokania , Amrita Mathuriya , Ramamoorthy Ramesh , Sasikanth Manipatruni
- Applicant: Kepler Computing Inc.
- Applicant Address: US CA San Francisco
- Assignee: KEPLER COMPUTING INC.
- Current Assignee: KEPLER COMPUTING INC.
- Current Assignee Address: US CA San Francisco
- Agency: MUGHAL GAUDRY & FRANKLIN PC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/324 ; H10B53/30 ; H10N70/20 ; H10N70/00 ; H01L23/522 ; H01L49/02

Abstract:
A memory device includes a first electrode comprising a first conductive nonlinear polar material, where the first conductive nonlinear polar material comprises a first average grain length. The memory device further includes a dielectric layer comprising a perovskite material on the first electrode, where the perovskite material includes a second average grain length. A second electrode comprising a second conductive nonlinear polar material is on the dielectric layer, where the second conductive nonlinear polar material includes a third grain average length that is less than or equal to the first average grain length or the second average grain length.
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