- 专利标题: Laser rapid fabrication method for flexible gallium nitride photodetector
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申请号: US17864324申请日: 2022-07-13
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公开(公告)号: US11894483B2公开(公告)日: 2024-02-06
- 发明人: Lingfei Ji , Weigao Sun
- 申请人: BEIJING UNIVERSITY OF TECHNOLOGY
- 申请人地址: CN Beijing
- 专利权人: BEIJING UNIVERSITY OF TECHNOLOGY
- 当前专利权人: BEIJING UNIVERSITY OF TECHNOLOGY
- 当前专利权人地址: CN Beijing
- 代理机构: J.C. PATENTS
- 优先权: CN 2110883036.9 2021.08.02
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; H01L31/0304
摘要:
The invention provides a laser rapid fabrication method for flexible gallium nitride (GaN) photodetector which comprises the following steps: (1) bonding a flexible substrate to a GaN epitaxial wafer; (2) adjusting the focal plane position of a light beam, and ensuring that the light beam is incident from the side of a GaN epitaxial wafer substrate; (3) enabling the light beam to perform scanning irradiation from the edge of a sample structure obtained in the step (1); (4) adjusting the process parameters, and scanning irradiation in the reverse direction along the path in the step (3); (5) remove the original rigid transparent substrate of the epitaxial wafer to obtain a Ga metal nanoparticle/GaN film/flexible substrate structure; and (6) preparing interdigital electrodes on the surfaces of the Ga metal nanoparticles obtained in the step (5). The flexible GaN photodetector with Ga metal nanoparticle in-situ distribution detection surface is prepared in one step through laser technology, the process is simplified, meanwhile, the surface of the detector is induced to form the surface plasmon resonance effect, the light absorption and light response performance is greatly enhanced, and the flexible gallium nitride photodetector is suitable for industrial production.
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