Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17406418Application Date: 2021-08-19
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Publication No.: US11895833B2Publication Date: 2024-02-06
- Inventor: Dong Oh Kim , Gyu Hyun Kil , Jung Hoon Han , Doo San Back
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR 20200164407 2020.11.30
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
A semiconductor memory device includes a substrate including a cell region, a core region, and a boundary region between the cell region and the core region, a boundary element isolation layer in the boundary region, the boundary element isolation layer being in a boundary element isolation recess and including first and second boundary liner layers extending along a profile of the boundary element isolation recess and a first gate structure on the core region and at least a part of the boundary element isolation layer, wherein the first gate structure includes a first high dielectric layer, and a first gate insulating pattern below the first high dielectric layer, with a top surface of the substrate being a base reference level, the first gate insulating pattern does not overlap a top surface of the first boundary liner layer, and wherein the first gate insulating pattern includes a first_1 gate insulating pattern between a top surface of the second boundary liner layer and a bottom surface of the first high dielectric layer, and a first_2 gate insulating pattern disposed a top surface of the core region and a bottom surface of the first high dielectric layer.
Public/Granted literature
- US20220173112A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-06-02
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