- 专利标题: Method for manufacturing optical device and optical device
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申请号: US17141223申请日: 2021-01-05
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公开(公告)号: US11909172B2公开(公告)日: 2024-02-20
- 发明人: Ziyi Zhang , Maki Kushimoto , Hiroshi Amano
- 申请人: ASAHI KASEI KABUSHIKI KAISHA , National University Corporation Tokai National Higher Education and Research System
- 申请人地址: JP Tokyo
- 专利权人: ASAHI KASEI KABUSHIKI KAISHA,National University Corporation Tokai National Higher Education and Research System
- 当前专利权人: ASAHI KASEI KABUSHIKI KAISHA,National University Corporation Tokai National Higher Education and Research System
- 当前专利权人地址: JP Tokyo; JP Nagoya
- 代理机构: KENJA IP LAW PC
- 主分类号: H01S5/026
- IPC分类号: H01S5/026 ; H01S5/22 ; H01S5/02 ; H01S5/40 ; H01S5/028 ; H01S5/34 ; H01S5/32
摘要:
An object of the present invention is to provide a method for manufacturing an optical device having a laser diode, which method is suitable for mass production, and an optical device having a laser diode which allows accurate property evaluations thereof with small measurement errors. Specifically, the method includes: an etching process of etching a semiconductor lamination unit to form a mesa structure having a resonator end face, thereby forming a laser diode; and a reflecting layer forming process of forming a light reflecting layer such that the light reflecting layer covers entire side surfaces of the mesa structure, wherein the semiconductor lamination unit has a substate, a n-type clad layer including a nitride semiconductor layer having n-type conductivity, a light-emitting layer including at least one quantum well, and a p-type clad layer including a nitride semiconductor layer having p-type conductivity, laminated in this order.
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