Vibrating element
摘要:
A vibrating element includes a movable part, a substrate made of metal, a driving source, and a holding member holding the substrate. The substrate includes a pair of support beam parts, a support part, and a torsion beam part. Each of the support beam parts has a first end part and a second end part. The support part supports the first end part. The torsion beam part swingably supports the movable part. The second end part of each of the support beam parts is provided with a fixing part fixed to the holding member. By adjusting an inclination with respect to the holding member, the fixing part is fixed to the holding member in a state in which each of the support beam parts applies tension to the torsion beam part in a direction away from the movable part in a first direction in which the torsion beam part extends.
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