Invention Grant
- Patent Title: Low impedance current path for edge non-uniformity tuning
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Application No.: US17324495Application Date: 2021-05-19
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Publication No.: US11929278B2Publication Date: 2024-03-12
- Inventor: Madhu Santosh Kumar Mutyala , Saketh Pemmasani , Akshay Dhanakshirur , Mayur Govind Kulkarni , Hang Yu , Deenesh Padhi
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C23C16/458 ; H01J37/32
Abstract:
Exemplary substrate support assemblies may include an electrostatic chuck body that defines a substrate support surface. The substrate support surface may define a plurality of protrusions that extend upward from the substrate support surface. A density of the plurality of protrusions within an outer region of the substrate support surface may be greater than in an inner region of the substrate support surface. The substrate support assemblies may include a support stem coupled with the electrostatic chuck body. The substrate support assemblies may include an electrode embedded within the electrostatic chuck body.
Public/Granted literature
- US20220375776A1 LOW IMPEDANCE CURRENT PATH FOR EDGE NON-UNIFORMITY TUNING Public/Granted day:2022-11-24
Information query
IPC分类:
