Invention Grant
- Patent Title: Semiconductor structure and method of manufacturing same
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Application No.: US17399062Application Date: 2021-08-11
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Publication No.: US11930635B2Publication Date: 2024-03-12
- Inventor: Zhongming Liu , Jia Fang
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN 2010684751.5 2020.07.16
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H10B12/00

Abstract:
The present application relates to a semiconductor structure and a method of manufacturing the same. The method includes: providing a substrate; forming a bitline contact hole located in the substrate, and a non-metal conductive layer with which a surface of the substrate is covered and the bitline contact hole is filled, the non-metal conductive layer provided with a first opening therein, the first opening aligned with the bitline contact hole; forming a metal conductive layer, with which a surface of the non-metal conductive layer is covered; forming an insulation layer, with which a surface of the metal conductive layer surface is covered; and etching the insulation layer, the metal conductive layer, and the non-metal conductive layer to form a bitline structure.
Public/Granted literature
- US20220020751A1 SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING SAME Public/Granted day:2022-01-20
Information query
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