- Patent Title: Semiconductor structure integrated with magnetic tunneling junction
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Application No.: US18178523Application Date: 2023-03-05
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Publication No.: US11930645B2Publication Date: 2024-03-12
- Inventor: Alexander Kalnitsky , Harry-Hak-Lay Chuang , Sheng-Haung Huang , Tien-Wei Chiang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT LAW
- Agent Anthony King
- The original application number of the division: US16717747 2019.12.17
- Main IPC: H10B61/00
- IPC: H10B61/00 ; G01R33/09 ; G11B5/39 ; H10N50/01 ; H10N50/10

Abstract:
The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate, a transistor region, a first and a second contact plug, a first metal via, a magnetic tunneling junction (MTJ) structure, and a metal interconnect. The transistor region includes a gate over the substrate, and a first and a second doped regions at least partially in the substrate. The first and the second contact plug are over the transistor region. The first and the second contact plug include a coplanar upper surface. The first metal via and the MTJ structure are over the first and the second contact plug, respectively. The first metal via is leveled with the MTJ structure. The metal interconnect is over the first metal via and the MTJ structure, and the metal interconnect includes at least two second metal vias in contact with the first metal via and the MTJ structure, respectively.
Public/Granted literature
- US20230225136A1 SEMICONDUCTOR STRUCTURE INTEGRATED WITH MAGNETIC TUNNELING JUNCTION Public/Granted day:2023-07-13
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