- 专利标题: MRAM structure for balanced loading
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申请号: US17884221申请日: 2022-08-09
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公开(公告)号: US11937515B2公开(公告)日: 2024-03-19
- 发明人: Chih-Fan Huang , Hsiang-Ku Shen , Liang-Wei Wang , Chen-Chiu Huang , Dian-Hau Chen , Yen-Ming Chen
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: HAYNES AND BOONE, LLP
- 分案原申请号: US17002098 2020.08.25
- 主分类号: H10N50/80
- IPC分类号: H10N50/80 ; H10B61/00 ; H10N50/01
摘要:
Semiconductor device and methods of forming the same are provided. A semiconductor device according to one embodiment includes a dielectric layer including a top surface, a plurality of magneto-resistive memory cells disposed in the dielectric layer and including top electrodes, a first etch stop layer disposed over the dielectric layer, a common electrode extending through the first etch stop layer to be in direct contact with the top electrodes, and a second etch stop layer disposed on the first etch stop layer and the common electrode. Top surfaces of the top electrodes are coplanar with the top surface of the dielectric layer.
公开/授权文献
- US20220384712A1 MRAM STRUCTURE FOR BALANCED LOADING 公开/授权日:2022-12-01
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